Sample stage

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United States of America

PATENT NO 10580613
APP PUB NO 20190287756A1
SERIAL NO

16430257

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.

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Patent Owner(s)

Patent OwnerAddress
PHENOM-WORLD HOLDING B VDILLENBURGSTRAAT 9T EINDHOVEN 5652 AM

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hammen, Adrianus Franciscus Johannes Eindhoven, NL 4 6
Kluijtmans, Ton Antonius Cornelis Henricus Eindhoven, NL 3 2
Stamsnijder, Gerhardus Bernardus Eindhoven, NL 2 2
Stoks, Sander Richard Marie Eindhoven, NL 11 161
van, den Bos Paul Cornelis Maria Eindhoven, NL 2 2
van, der Mast Karel Diederick Eindhoven, NL 28 879

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