Determining interaction forces in a dynamic mode AFM during imaging

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United States of America

PATENT NO 10578643
APP PUB NO 20190025340A1
SERIAL NO

15757704

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Abstract

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A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).

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Patent Owner(s)

Patent OwnerAddress
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNOANNA VAN BUERENPLEIN 1 'S-GRAVENHAGE 2595 DA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sadeghian, Marnani Hamed 's-Gravenhage, NL 60 47
Tamer, Mehmet Selman 's-Gravenhage, NL 2 2

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