Atomic force microscope with optical guiding mechanism
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United States of America
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Feb 18, 2020
Grant Date -
Feb 28, 2019
app pub date -
Aug 27, 2018
filing date -
Aug 27, 2018
priority date (Note) -
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Abstract
An atomic force microscope includes a scanner for scanning a probe along at least one translational axis, a stationary light source for generating an incident light beam, a stationary position sensitive detector for detecting a light beam reflected from a cantilever, an optical guiding mechanism for compensating a scanning motion of the probe and configured to guide the incident light beam to a spot on the cantilever and to guide the reflected light beam from the cantilever to the position sensitive detector, wherein the optical guiding mechanism includes at least two optical deflection elements per translational axis arranged to move synchronously with the probe along the respective translational axis, and configured to define an optical path between the light source and the detector for the incident and reflected light beam such that the optical path length is independent of the translation of the probe along the respective translational axis.
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