Method for preparing synthetic quartz glass substrate

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United States of America

PATENT NO 10558116
APP PUB NO 20160363856A1
SERIAL NO

15175072

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Abstract

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A synthetic quartz glass substrate is prepared by furnishing a synthetic quartz glass block, coating two opposite surfaces of the block with a liquid having a transmittance of at least 99.0%/mm at the wavelength of birefringence measurement, measuring a birefringence distribution on the block by letting light enter one coated surface and exit the other coated surface, and sorting the block to an acceptable group or unacceptable group, based on the measured birefringence distribution.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTD4-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-0005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Kazuhiko Joetsu, JP 31 285
Harada, Daijitsu Joetsu, JP 46 74
Shirota, Kazuo Joetsu, JP 18 71
Takeuchi, Masaki Joetsu, JP 174 1242
Yagi, Hisashi Joetsu, JP 9 35

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