Purge load port
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United States of America
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Feb 4, 2020
Grant Date -
Mar 9, 2017
app pub date -
Nov 18, 2015
filing date -
Nov 18, 2015
priority date (Note) -
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Abstract
A purge load port which is a load port devised with a purging plate and a purging module. The purging plate has inlet nozzles, outlet nozzles and recognizer; and the purging module has an inlet opening, an outlet opening, at least a temperature and humidity sensor, at least a flow meter and at least a pressure sensor. It makes the load port incapable of purging to provide the purging techniques after being devised with purging plate and purging modules, which solves the problem of controlling the cleanness by conventional load port, and thus effectively improves the yield of wafers in microchip fabrication.
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