Vapor deposition system
Number of patents in Portfolio can not be more than 2000
United States of America
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Feb 4, 2020
Grant Date -
Mar 27, 2014
app pub date -
Oct 16, 2012
filing date -
Oct 16, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A deposition system includes a system housing having a housing interior, a fixture transfer assembly having a generally sloped fixture transfer rail extending through the housing interior, a plurality of processing chambers connected by the fixture transfer rail, a controller interfacing with the processing chambers and at least one fixture carrier assembly carried by the fixture transfer rail and adapted to contain one substrate. The fixture carrier assembly travels along the fixture transfer rail under influence of gravity.
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