Deposition apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10547003
APP PUB NO 20180019395A1
SERIAL NO

15429740

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Importance

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Abstract

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A deposition apparatus includes a chamber, a first stage and a second stage for supporting substrates within the chamber, an evaporating source assembly moving a first stage area corresponding to the first stage and a second stage area corresponding to the second stage, and including a plurality of nozzles through which a source material is spurted, and a photographing assembly which is disposed between the first stage and the second stage and photographs the plurality of nozzles.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hwang, In Hyun Yongin-si, KR 4 3
Kang, Seung Ki Yongin-si, KR 1 3
Mun, Ju Eel Yongin-si, KR 1 3
Park, Jae Wan Yongin-si, KR 69 487

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