Coating compositions suitable for use with an overcoated photoresist

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10539873
APP PUB NO 20170108776A1
SERIAL NO

14605465

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Abstract

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Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amara, John P Charlestown, US 12 101
Cameron, James F Cambridge, US 111 1077
Prokopowicz, Gregory P Worcester, US 28 257
Sung, Jin Wuk Worcester, US 23 197
Valeri, David A Leominster, US 8 56

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