Lithographic apparatus and device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10527955
APP PUB NO 20190227444A1
SERIAL NO

16369721

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Importance

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Abstract

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Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL - 5504 DR

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bijlaart, Erik Theodorus Maria Rosmalen, NL 28 1779
Hoogendam, Christiaan Alexander Veldhoven, NL 205 9950
Kolesnychenko, Aleksey Yurievich Helmond, NL 68 2643
Loopstra, Erik Roelof Heeze, NL 325 13468
Mertens, Jeroen Johannes Sophia Maria Duizel, NL 160 6273
Mulkens, Johannes Catharinus Hubertus Waalre, NL 213 10886
Slaghekke, Bernardus Antonius Veldhoven, NL 18 774
Streefkerk, Bob Tilburg, NL 201 10575
Tinnemans, Patricius Aloysius Jacobus Hapert, NL 112 1369
Van, Santen Helmar Amsterdam, NL 101 4784

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