Substrate transfer apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10522379
SERIAL NO

15707023

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Abstract

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A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTD129 SAMSUNG-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16677

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Chul Hwan Seoul, KR 19 61
Choi, Sang Jin Yongin-si, KR 15 43
Hong, Yong Joon Seongnam-si, KR 4 24
Kim, Kang Soo Uiwang-si, KR 8 41
Kong, Dae Wee Yongin-si, KR 6 11
Lee, Heok Jae Suwon-si, KR 1 5
Park, Kang Min Hwaseong-si, KR 8 182
Roh, Sang Ho Seoul, KR 2 3

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