Voltage generator, voltage waveform generator, semiconductor device manufacturing apparatus, voltage waveform generation method, and semiconductor device manufacturing method
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United States of America
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Jan 31, 2019
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Jan 31, 2019
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Abstract
A voltage generator includes a pulse circuit and a slope circuit. The pulse circuit is to apply voltages of three different levels to an output terminal and the slope circuit is to apply a slope voltage to the output terminal. The slope circuit includes an inductor to take current out of a capacitive load connected to the output terminal.
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