Gas purge unit and gas purge apparatus
Number of patents in Portfolio can not be more than 2000
United States of America
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app pub date -
Nov 19, 2015
filing date -
Nov 19, 2015
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Abstract
A gas purge unit 20 introduces a cleaning gas into a purging container 2 with an opening 2b therethrough. The gas purge unit 20 includes a first nozzle outlet 26 and a second nozzle outlet 28. The first nozzle outlet 26 blows out the cleaning gas from a lateral side line part of the opening 2b toward the inside of the purging container 2. The second nozzle outlet 28 blows out the cleaning gas from the lateral side line part of the opening 2b toward an opening surface of the opening 2b.
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