Magnetoelastically actuated MEMS device and methods for its manufacture
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United States of America
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Sep 28, 2017
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Sep 28, 2017
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Abstract
A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.
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International Classification(s)
- C25D:PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC ....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- H02N:ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....
- H01F:MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF M....
- H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....
- H01H:ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PR....
- H01G:CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWI....
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