Temperature difference measuring apparatus
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United States of America Patent
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Nov 26, 2019
Grant Date -
Nov 30, 2017
app pub date -
Aug 18, 2017
filing date -
Mar 12, 2015
priority date (Note) -
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Abstract
A temperature difference measuring apparatus includes: a bottomed tubular package in which a top face side is opened; a MEMS device disposed on an inner bottom face of the package, the MEMS device comprising at least one thermopile that measures a temperature difference, which is generated in the MEMS device by inflow heat through a bottom of the package; and a heat quantity increasing unit configured to increase a heat quantity flowing out from the MEMS device onto the top face side of the bottomed tubular package.
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