Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box
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United States of America Patent
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Nov 12, 2019
Grant Date -
Nov 5, 2015
app pub date -
Nov 7, 2013
filing date -
Dec 28, 2012
priority date (Note) -
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Abstract
A treatment device treats a treatment subject inside a treatment chamber with treatment fluids of a plurality of types. An exhaust switching unit is provided to an exhaust pipe connected to the inside of the treatment chamber, and the exhaust switching unit is formed of a distribution box, switching valve boxes, and an exhaust tube. Additionally, the switching valve boxes, which correspond in number to the treatment fluids, are connected to the distribution box in a parallel state.
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