Apparatus and method to control properties of fluid discharge via refrigerative exhaust

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United States of America Patent

PATENT NO 10443943
APP PUB NO 20170284752A1
SERIAL NO

15472978

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Abstract

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An apparatus and method for controlling fluid discharge temperature on a semiconductor manufacturing tool. In this technique, the temperature is controlled via the use of refrigerative exhaust. This embodiment includes the hardware and controls to perform and monitor the described operation.

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Patent Owner(s)

Patent OwnerAddress
VEECO INSTRUMENTS INCTERMINAL DRIVE PLAINVIEW NY 11803

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiaverini, George Doylestown, US 1 0
Li, Jia Dunellen, US 426 6096
Mauer, Laura South Kent, US 13 50
Taddei, John Jim Thorpe, US 26 69

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