Acoustic wave device and method of fabricating the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10425060
APP PUB NO 20170201232A1
SERIAL NO

15331598

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Abstract

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An acoustic wave device includes: a piezoelectric substrate; a comb-shaped electrode that is located on the piezoelectric substrate and excites an acoustic wave; and a silicon oxide film that is located on the piezoelectric substrate so as to cover the comb-shaped electrode, and has a total concentration of carbon (C), hydrogen (H), nitrogen (N), and fluorine (F) equal to or less than 3.5 atomic %.

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Patent Owner(s)

Patent OwnerAddress
TAIYO YUDEN CO LTD7-19 KYOBASHI 2-CHOME CHUO-KU TOKYO 1040031 ?1040031

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsuda, Takashi Tokyo, JP 450 5635
Matsukura, Fumiya Tokyo, JP 4 333
Miyashita, Tsutomu Tokyo, JP 58 937
Nakamura, Kentaro Tokyo, JP 241 2064
Tsutsumi, Jun Tokyo, JP 79 1588

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