Process of manufacturing droplet jetting devices

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United States of America Patent

PATENT NO 10391768
APP PUB NO 20180290450A1
SERIAL NO

15766139

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Abstract

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A process of manufacturing droplet jetting devices includes bonding together a nozzle wafer defining nozzles of the jetting devices, a membrane wafer carrying, on a membrane, actuators for generating pressure waves in a liquid in pressure chambers that are connected to the nozzles, and a distribution wafer forming a distribution layer that defines supply lines for supplying the liquid to the pressure chambers from a liquid reservoir formed on a side of the distribution layer opposite to the membrane wafer; and dicing the bonded wafers. The distribution layer has a thickness larger than the thickness of each of the other two wafers. A restrictor for controlling the inertance of the liquid supply line is formed through the distribution layer in a direction normal to the plane of that layer.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 1468501 ?1468501

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huygens, Maikel A J Venlo, NL 4 2
Reinten, Hans Venlo, NL 50 231
Van, der Meer René J Venlo, NL 7 19
Verzijl, Klaas Venlo, NL 9 27

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