Linear motor, magnet unit, and stage device
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United States of America Patent
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Aug 13, 2019
Grant Date -
Aug 18, 2016
app pub date -
Feb 15, 2016
filing date -
Feb 17, 2015
priority date (Note) -
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Abstract
A linear motor includes a movable element and a stator. The stator includes a pair of back yokes provided opposing each other such as to flank the movable element along a direction perpendicular to the movable element's axis of travel, a plurality of main pole magnets provided spaced apart from each other and paralleling the axis of travel, on respective inside lateral surfaces of the pair of back yokes, and first and second interpole magnets provided, adjoining along said axis of travel, in each of intervals between adjoining couples of the main pole magnets.
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