Substrate container, load port apparatus, and substrate treating apparatus
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United States of America Patent
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Aug 13, 2019
Grant Date -
Oct 12, 2017
app pub date -
Jul 28, 2015
filing date -
Sep 29, 2014
priority date (Note) -
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Abstract
A substrate container includes a casing, a rack, a lid, a lid holder, and a substrate separating mechanism. The casing has on its front face an opening. The substrate separating mechanism has a contact part that directly contacts substrates. The contact part is movable relative to the lid holder. The lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds ends of the substrates. The lid moves backward from the opening, and the contact part moves forward to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.
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