Target for ultraviolet light generation, and method for manufacturing same
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United States of America Patent
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Aug 13, 2019
Grant Date -
Jun 28, 2018
app pub date -
Jun 6, 2016
filing date -
Jun 11, 2015
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Abstract
A target for ultraviolet light generation 20A includes a sapphire substrate 21 that transmits ultraviolet light UV, an interlayer 22 that is in contact with the sapphire substrate 21, includes oxygen atoms and aluminum atoms in a composition, and transmits ultraviolet light UV, and a luminous layer 23 that is provided on the interlayer 22, includes oxide crystals containing rare earth elements to which an activator agent is added, and receives electron beams EB so as to generate ultraviolet light UV.
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