Thermal chamber exhaust structure and method

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United States of America Patent

PATENT NO 10366909
APP PUB NO 20190035653A1
SERIAL NO

15694161

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Abstract

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An exhaust structure includes an intake section including a first high thermal conductivity material, the intake section having an inlet, an output section including a second high thermal conductivity material, the output section having an outlet, and a piping section including a third high thermal conductivity material, the piping section being configured to communicatively couple the intake section with the output section. The exhaust structure provides a high thermal conductivity path from the inlet to the outlet, the high thermal conductivity path including the first high thermal conductivity material, the second high thermal conductivity material, and the third high thermal conductivity material.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsieh, Hsien-Chang Hsinchu, TW 5 12
Lin, Chun-Chih Taipei, TW 55 80
Shih, Tah-te Hsinchu, TW 11 27
Su, Yu-Jen Hsinchu, TW 19 72
Wu, Wen-Hsong Hsinchu, TW 4 0
Yang, Chune-Te Erlin Township, TW 4 6

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