Charged particle beam system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10354830
APP PUB NO 20170294285A1
SERIAL NO

15469702

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An ion source includes an external housing, an electrically conductive tip, a gas supply system, configured to supply an operating gas into the neighborhood of the tip, and a cooling system configured to cool the tip. The gas supply system includes a first tube with a hollow interior, and a chemical getter material is provided in the hollow interior of the tube.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY LLCONE ZEISS DRIVE THORNWOOD NY 10594

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Weijie North Reading, US 22 75
Notte, John A Gloucester, US 7 97

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