Thin film production method and transparent conductive film

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United States of America Patent

PATENT NO 10328453
APP PUB NO 20160221031A1
SERIAL NO

15097956

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Abstract

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In order to provide a novel method of obtaining a thin film to replace the related art, provided is a method of manufacturing a thin film, including: generating mist of a dispersion liquid containing fine particles; supplying the generated mist of the dispersion liquid onto a substrate; and drying the dispersion liquid supplied onto the substrate.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakazumi, Makoto Yamato, JP 19 21
Nishi, Yasutaka Tokyo, JP 23 55

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