Printed chemical mechanical polishing pad

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10322491
APP PUB NO 20160107288A1
SERIAL NO

14885955

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bajaj, Rajeev Fremont, US 162 3380
Krishnan, Kasiraman Milpitas, US 61 1444
Menk, Gregory E Pleasanton, US 49 864
Michaelson, Timothy Santa Clara, US 17 2620
Orilall, Mahendra Christopher Santa Clara, US 9 118
Patibandla, Nag B Pleasanton, US 159 2040
Redeker, Fred C Fremont, US 195 5499
Redfield, Daniel Morgan Hill, US 65 1172

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