Extreme ultraviolet light generation apparatus
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United States of America Patent
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Jun 4, 2019
Grant Date -
Mar 2, 2017
app pub date -
Nov 9, 2016
filing date -
Mar 18, 2010
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Abstract
An apparatus for generating extreme ultraviolet light used with a laser apparatus and connected to an external device so as to supply the extreme ultraviolet light thereto includes a chamber provided with at least one inlet through which a laser beam is introduced into the chamber; a target supply unit provided on the chamber configured to supply a target material to a predetermined region inside the chamber; a discharge pump connected to the chamber; at least one optical element provided inside the chamber; an etching gas introduction unit provided on the chamber through which an etching gas passes; and at least one temperature control mechanism for controlling a temperature of the at least one optical element.
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