Electrode for a microelectromechanical device
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United States of America Patent
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May 7, 2019
Grant Date -
Jul 20, 2017
app pub date -
Sep 9, 2016
filing date -
Sep 9, 2015
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Abstract
A microelectromechanical device structure comprises a supporting structure wafer. A cavity electrode is formed within a cavity in the supporting structure wafer. The cavity electrode forms a protruding structure from a base of the cavity towards the functional layer, and the cavity electrode is connected to a defined electrical potential. The cavity electrode comprises a silicon column within the cavity in the supporting structure wafer, which is partially or entirely surrounded by a cavity. One or more cavity electrodes may be utilized for adjusting a frequency of an oscillation occurring within the functional layer.
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