Semiconductor strips with undercuts and methods for forming the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10269937
APP PUB NO 20180130896A1
SERIAL NO

15864575

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Abstract

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An integrated circuit device includes a semiconductor substrate, and a semiconductor strip extending into the semiconductor substrate. A first and a second dielectric region are on opposite sides of, and in contact with, the semiconductor strip. Each of the first dielectric region and the second dielectric region includes a first portion level with the semiconductor strip, and a second portion lower than the semiconductor strip. The second portion further includes a portion overlapped by the semiconductor strip.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chia-Wei Taichung, TW 186 1465
Chen, Chao-Cheng Hsinchu, TW 242 2858
Huang, Tai-Chun Hsinchu, TW 170 1430
Lee, Tze-Liang Hsinchu, TW 403 4505
Lien, Hao-Ming Hsinchu, TW 34 329
Peng, Chih-Tang Zhubei, TW 74 691
Yu, Ming-Hua Hsinchu, TW 139 1593

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