Method and apparatus for curing thin films on low-temperature substrates at high speeds

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United States of America Patent

PATENT NO 10244636
APP PUB NO 20170303403A1
SERIAL NO

15479017

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Abstract

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A composite film is disclosed. The composite film includes a substrate, a thermal barrier layer located on top of the substrate, wherein the thermal barrier layer has a higher decomposition temperature than the substrate, and a thin film located on top of the thermal barrier layer, wherein the thin film is to be thermally processed by a pulsed light from a flashlamp.

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Patent Owner(s)

Patent OwnerAddress
PULSEFORGE INC400 PARKER DRIVE SUITE 1100 AUSTIN TX 78728

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jackson, Doug K Austin, US 8 173
Martin, Karl M Austin, US 7 52
McCool, Steven C Austin, US 13 107
Schroder, Kurt A Coupland, US 53 452

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