Thin film transistor and manufacturing method thereof, array substrate, and display device
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United States of America Patent
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Feb 26, 2019
Grant Date -
Oct 5, 2017
app pub date -
Jun 16, 2017
filing date -
Dec 21, 2012
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Abstract
The technical disclosure relates to a thin film transistor and a manufacturing method thereof, an array substrate and a display device. The thin film transistor comprises a base substrate, a gate electrode, an active layer, source/drain electrodes, a pixel electrode and one or more insulating layers, wherein at least one of the insulating layers comprises a bottom insulating sub-layer and a top insulating sub-layer, the top insulating sub-layer having a hydrogen content higher than that of the bottom insulating sub-layer.
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