Substrate processing apparatus and substrate processing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 19, 2019
Grant Date -
Feb 4, 2016
app pub date -
Jul 29, 2015
filing date -
Jul 29, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A phosphoric acid aqueous solution in a production tank circulates a circulation system. The circulation system is configured to be switchable between a first state in which the phosphoric acid aqueous solution is circulated through a bypass pipe and a second state in which the phosphoric acid aqueous solution is circulated through a filter. When a silicon containing liquid is supplied to the production tank, the circulation system is switched to the first state. When silicon particles are uniformly dispersed in the phosphoric acid aqueous solution, the circulation system is switched to the second state. Alternatively, a filtration member is provided in the production tank. The silicon containing liquid is stored in the filtration member. The filtration member is dipped in the phosphoric acid aqueous solution stored in the production tank. The silicon containing liquid is permeated through the filtration member, and is mixed with the phosphoric acid aqueous solution.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SCREEN HOLDINGS CO LTD | KYOTO-SHI KYOTO 602-8585 |
International Classification(s)

- 2015 Application Filing Year
- C03C Class
- 892 Applications Filed
- 680 Patents Issued To-Date
- 76.24 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Hinode, Taiki | Kyoto, JP | 23 | 120 |
# of filed Patents : 23 Total Citations : 120 | |||
Kamihiro, Yasukatsu | Kyoto, JP | 1 | 11 |
# of filed Patents : 1 Total Citations : 11 | |||
Namba, Toshimitsu | Kyoto, JP | 8 | 55 |
# of filed Patents : 8 Total Citations : 55 | |||
Ota, Takashi | Kyoto, JP | 151 | 1095 |
# of filed Patents : 151 Total Citations : 1095 | |||
Saito, Kazuhide | Kyoto, JP | 17 | 173 |
# of filed Patents : 17 Total Citations : 173 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 2 Citation Count
- C03C Class
- 44.37 % this patent is cited more than
- 6 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Aug 19, 2026 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 19, 2030 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Jul 13, 2022 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ANATTASAKUL, ROATCHANATAM;NG, PIUS;REEL/FRAME:061627/0292 Owner name: KUBOTA CORPORATION, JAPAN Effective Date: Jul 13, 2022 |

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