Substrate processing apparatus and substrate processing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10211063
APP PUB NO 20160035597A1
SERIAL NO

14812022

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Abstract

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A phosphoric acid aqueous solution in a production tank circulates a circulation system. The circulation system is configured to be switchable between a first state in which the phosphoric acid aqueous solution is circulated through a bypass pipe and a second state in which the phosphoric acid aqueous solution is circulated through a filter. When a silicon containing liquid is supplied to the production tank, the circulation system is switched to the first state. When silicon particles are uniformly dispersed in the phosphoric acid aqueous solution, the circulation system is switched to the second state. Alternatively, a filtration member is provided in the production tank. The silicon containing liquid is stored in the filtration member. The filtration member is dipped in the phosphoric acid aqueous solution stored in the production tank. The silicon containing liquid is permeated through the filtration member, and is mixed with the phosphoric acid aqueous solution.

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Patent Owner(s)

Patent OwnerAddress
SCREEN HOLDINGS CO LTDKYOTO-SHI KYOTO 602-8585

International Classification(s)

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  • 2015 Application Filing Year
  • C03C Class
  • 892 Applications Filed
  • 680 Patents Issued To-Date
  • 76.24 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20152016201720182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hinode, Taiki Kyoto, JP 23 120
Kamihiro, Yasukatsu Kyoto, JP 1 11
Namba, Toshimitsu Kyoto, JP 8 55
Ota, Takashi Kyoto, JP 151 1095
Saito, Kazuhide Kyoto, JP 17 173

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Patent Citation Ranking

  • 2 Citation Count
  • C03C Class
  • 44.37 % this patent is cited more than
  • 6 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges26031013301 - 1011 - 2021 - 30020406080100120140160180200220240260280300320340

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