Noise reduction techniques, fractional bi-spectrum and fractional cross-correlation, and applications
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United States of America Patent
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Feb 12, 2019
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May 10, 2018
app pub date -
Sep 13, 2017
filing date -
Jul 16, 2013
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Abstract
A measurement method and system include illuminating an object to be measured with light at two different wavelengths and an incident angle; capturing an image of the object; detecting a frequency of an interference pattern from the image using Fractional Bi-Spectrum Analysis; and calculating a thickness of the object based on the Fractional Bi-Spectrum Analysis. The thickness is calculated based on a relationship between the thickness and the frequency of the interference pattern. The Fractional Bi-Spectrum Analysis is performed on a linear medium with the two different wavelengths being known.
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