Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system
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United States of America Patent
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Jan 29, 2019
Grant Date -
Jul 27, 2017
app pub date -
Feb 19, 2016
filing date -
Jan 26, 2016
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Abstract
Methods for operating a substrate processing cluster tool include positioning a substrate storage cassette within a factory interface of the substrate processing cluster tool, wherein the substrate storage cassette defines an interior volume dimensioned and arranged to receive one or more substrates, and sensing, by execution of stored instructions by a processor operatively associated with a plurality of sensors, at least one of occurrence of a condition of a plurality of conditions within the interior volume or persistence of a condition of the plurality of conditions within the interior volume. Responsive to the sensing, at least one of generating an alert or performing an alternate operation involving the substrate storage cassette.
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