Plasma confinement apparatus, and method for confining a plasma
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United States of America Patent
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Jan 22, 2019
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Apr 17, 2014
app pub date -
Dec 16, 2013
filing date -
Oct 14, 2005
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Abstract
A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.
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