Method for forming color filter array, method for manufacturing imaging apparatus, and imaging apparatus
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United States of America Patent
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Jan 8, 2019
Grant Date -
Mar 3, 2016
app pub date -
Aug 27, 2015
filing date -
Aug 29, 2014
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Abstract
A method for forming a color filter array includes a step of exposing a photosensitive color filter film, a step of forming a color filter array from the color filter film by developing the color filter film using a developer, and a step of cleaning the color filter array while rotating the color filter array and moving a nozzle for spraying fluid containing liquid and gas above the color filter array in a direction intersecting with an axis of the rotation. The method reduces variation in thickness of a color filter that is generated in the cleaning step.
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