Structure for achieving dimensional stability during temperature changes

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United States of America Patent

PATENT NO 10168261
APP PUB NO 20160282243A1
SERIAL NO

15076847

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Abstract

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A heated or cooled sample holding stage for use in a nanoindentation measurement system is described. The geometry of the design and the selection of materials minimizes movement of a sample holder with respect to a nanoindentation tip over a wide range of temperatures. The system controls and minimizes motion of the sample holder due to the heating or cooling of the tip holder and/or the sample holder in a high temperature nanoindentation system. This is achieved by a combination of geometry, material selection and multiple sources and sinks of heat. The system is designed to control both the steady state and the transient displacement response.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

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  • 2016 Application Filing Year
  • H01J Class
  • 2255 Applications Filed
  • 1758 Patents Issued To-Date
  • 77.97 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anthony, Richard Maryville, US 6 38
Oliver, Warren Knoxville, US 5 60
Pardhasaradhi, Sudharshan Phani Knoxville, US 2 0

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1224171267333112101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6081 - 90100 +0100200300400500600700800900100011001200130014001500160017001800

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