Fixture to support reel-to-reel inspection of semiconductor devices or other components
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United States of America Patent
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Jan 1, 2019
Grant Date -
Feb 16, 2017
app pub date -
Aug 10, 2015
filing date -
Aug 10, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A system includes a component inspection system having a radiation source configured to generate radiation and a radiation detector configured to detect the radiation after the radiation passes through components to be inspected. The system also includes a fixture configured to receive multiple reels that are each configured to receive a tape in or on which the components are located. The fixture includes a base configured to be secured to a support, a shaft, one or more motors mounted to the shaft and configured to rotate the reels, and one or more joints coupling the shaft and base. The one or more joints are configured to allow (i) rotation of the shaft about a longitudinal axis of the shaft to change an orientation of the shaft with respect to the base and (ii) rotation of the shaft to change a direction at which the shaft extends away from the base.
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