Composite device with cylindrical anisotropic thermal conductivity
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United States of America Patent
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Dec 11, 2018
Grant Date -
Apr 20, 2017
app pub date -
Oct 19, 2015
filing date -
Oct 19, 2015
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Abstract
An apparatus for supporting a substrate in a process chamber and regulating surface temperature of the substrate and method of making the same is provided. The apparatus includes a base support having a surface adapted to support the substrate and a heater for heating the substrate with the heater being disposed proximate the base support. The base support is made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, each of the plurality thermally conductive arcuate members being arranged concentrically and defining predetermined intervals in a radial direction such that the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions in a cylindrical coordinate system of the base support.
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