Array substrate, method for manufacturing the same and display device

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United States of America Patent

PATENT NO 10147644
APP PUB NO 20180090378A1
SERIAL NO

15522861

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Abstract

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An array substrate and a method for manufacturing the same, and a display device are provided. The method includes: forming a thin film transistor (TFT) structure of a display region and a TFT structure of the GOA region on a substrate; sequentially forming a first insulating layer, an indium tin oxide (ITO) layer and a photoresist layer on the TFT structure; exposing and developing the photoresist layer using a halftone mask plate, and etching the ITO layer, to form an electrode layer in the GOA region and an electrode layer in the display region; and ashing the remaining photoresist to completely remove the photoresist on the electrode layer in the display region and to thinning the photoresist on the electrode layer in the GOA region.

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Patent Owner(s)

Patent OwnerAddress
BOE TECHNOLOGY GROUP CO LTD100015 NO 10 JIUXIANQIAO ROAD BEIJING CHAOYANG DISTRICT BEIJING CITY BEIJING CITY 100015
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD230012 HEFEI CITY ANHUI NEW STATION INDUSTRIAL PARK HEFEI CITY ANHUI PROVINCE 230012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jiang, Xuebing Beijing, CN 29 41
Lu, Yanchun Beijing, CN 7 4

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