Diaphragm changing device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10139733
APP PUB NO 20160282724A1
SERIAL NO

15060257

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Abstract

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The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT AGRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bieg, Hermann Huettlingen, DE 14 49
Bischoff, Thomas Koenigsbronn, DE 22 116
Kwan, Yim-Bun Patrick Aalen, DE 67 465
Muehlbeyer, Michael Aalen, DE 18 147
Nguyen, Uy-Liem Zurich, CH 20 105
Will, Marcus Ulm, DE 5 15
Xalter, Stefan Oberkochen, DE 44 397

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