Apparatus and method for ionic liquid electroplating
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United States of America Patent
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Nov 27, 2018
Grant Date -
Jan 5, 2017
app pub date -
Sep 14, 2016
filing date -
Oct 14, 2013
priority date (Note) -
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Abstract
An electroplating apparatus includes a container containing plural portions and an ionic liquid plating solution that is capable of flowing therebetween. The plural portions include at least a first portion containing a counter electrode that includes coating donor material and a second portion that includes a workpiece. A porous scrubber separating the first and second portions has a plurality of metallic outer surfaces in contact with the ionic liquid plating solution. Coating, repair, and regeneration methods using an ionic liquid plating solution are also described.
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