Imprint apparatus and imprint method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10131135
APP PUB NO 20170021607A1
SERIAL NO

15059625

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Abstract

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An imprint apparatus according to one embodiment includes a contact processing unit and a defect determination unit. The contact processing unit brings a template pattern formed on a front surface of a template into contact with resist placed on a substrate. The defect determination unit determines a defect in an imprint process, on the basis of force which is generated from at least one of the template, the resist, and the substrate, during the imprint process.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO 108-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hiroshima, Masahito Tokyo, JP 12 120
Matsuoka, Yasuo Kanagawa, JP 24 375
Nomura, Hiroshi Kanagawa, JP 449 6816

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