Semiconductor device having supporters and method of manufacturing the same
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United States of America Patent
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Nov 6, 2018
Grant Date -
Mar 16, 2017
app pub date -
Mar 29, 2016
filing date -
Sep 11, 2015
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Abstract
A semiconductor device includes storage electrodes on a substrate and one or more supporters configured to couple one or more portions of the storage electrodes. The semiconductor device may include multiple non-intersecting supporters extending in parallel to a surface of the substrate. At least one supporter may have an upper surface that is substantially coplanar with upper surfaces of the storage electrodes. The storage electrodes may include a capacitor dielectric layer that conformally covers one or more surfaces of the storage electrodes and one or more supporters. A storage electrode may include upper and lower storage electrodes coupled together. The upper and lower storage electrodes may have different horizontal widths.
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