Ion pump noble gas stability using small grain sized cathode material

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United States of America Patent

PATENT NO 10121627
SERIAL NO

15794023

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Abstract

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A method includes assessing a plurality of Titanium plates to determine a grain size for each plate and removing all Titanium plates with an average grain size that is larger than a threshold size from the plurality of Titanium plates. One of the Titanium plates remaining in the plurality of Titanium plates after the removing step is then used to form a cathode for an ion pump.

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Patent Owner(s)

Patent OwnerAddress
EDWARDS VACUUM LLC6416 INDUCON DRIVE WEST SANBORN NY 14132

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wynohrad, Anthony Osage, US 3 1

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