Pellicle including a water-soluble adhesive and photomask assembly including the pellicle
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United States of America Patent
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Oct 2, 2018
Grant Date -
Mar 30, 2017
app pub date -
Sep 1, 2016
filing date -
Sep 30, 2015
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Abstract
A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.
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