Scanning probe microscope and its sample holder
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United States of America Patent
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Sep 11, 2018
Grant Date -
Nov 30, 2017
app pub date -
Dec 24, 2014
filing date -
Dec 24, 2014
priority date (Note) -
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Abstract
This sample holder for a scanning probe microscope is constituted of (1) a container that retains a liquid and (2) a flat-plate-shaped upper cover that covers an upper opening of the container and that has a narrow slit above the position where a sample is placed. In the upper cover, the slit has a slit width with which a thin film of the liquid is formed over the upper surface of the sample when the liquid fills the space between the container and the upper cover. The thin film of the liquid has a film thickness smaller than the distance between the upper surface of the sample and the upper cover.
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