Charged particle beam apparatus and vibration damper for charged particle beam apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10056226
APP PUB NO 20170250054A1
SERIAL NO

15440327

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECH CORPORATION17-1 TORANOMON 1-CHOME MINATO-KU TOKYO 105-6409

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukushima, Yoshimasa Tokyo, JP 14 503
Niibori, Tetsuya Hitachinaka, JP 5 75
Onuki, Katsunori Tokyo, JP 19 62
Takahashi, Motohiro Tokyo, JP 30 129

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