Deposition on two sides of a web
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United States of America Patent
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Aug 7, 2018
Grant Date -
Oct 9, 2014
app pub date -
Apr 14, 2014
filing date -
Dec 14, 2009
priority date (Note) -
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Abstract
Apparatuses and methods for depositing materials on both side of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but not inside the deposition chamber. At such support points, the web may be exposed to different conditions (e.g., temperature) than during the deposition.
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