Charged particle detecting device and charged particle beam system with same

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United States of America Patent

PATENT NO 10037862
SERIAL NO

15163401

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Abstract

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A charged particle detecting device includes: a holding structure; a first charged particle detector at the terminal portion of the holding structure; a second charged particle detector at the terminal portion of the holding structure; a detector head at the terminal portion of the holding structure; and a first electrode which is transmissive for the first and second species of charged particles covering an entrance opening of the detector head.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY LLCONE ZEISS DRIVE THORNWOOD NY 10594

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hill, Raymond Rowley, US 53 1962
Notte,, IV John A Gloucester, US 46 887
Sijbrandij, Sybren J Wakefield, US 2 13

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