Composite substrate, method for fabricating same, function element, and seed crystal substrate
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Dec 15, 2015
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Jul 22, 2013
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Abstract
A composite substrate includes a polycrystalline ceramic substrate, a silicon substrate directly bonded to the polycrystalline ceramic substrate, a seed crystal film formed on the silicon substrate by vapor phase process and made of a nitride of a group 13 element, and a gallium nitride crystal layer grown on the seed crystal film by flux method.
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